DDFILM - Version 2 (Integrated into DDSURF)

Description: This technology is a software package that models the internal fields of a feature (defect) embedded within an infinite thin film. The system is suited for use in the design of semiconductor wafer fabrication equipment and semiconductor wafer inspection where thin layers of semiconductor materials are deposited onto a silicon substrate. This software is an add-on module to DDSURF, which was created at Arizona State University.

Category(s):

Technologies